Spin-1200T

  • Spin-1200T

  • Touch panel control
    Programmable Recipe management
    Easy operation
    Adopt Drain, Exhaust hole in bowl
Photo-litho / Spin System / Coating - Spin-1200T
  • specification
Type Spin coater system
Substrate size piece ~ up to 4" circle
Rotation speed 300 ~ 10,000rpm(@without load) an error of less than 1%
DC Servo Motor
Spin state 50steps, 50recipes (digital type)
Bowl size 8", P.P
Acceleration / Deceleration rate Variable
Chuck material Anodized AL, Acetal
Electric power 220V, 5A
Oiless vacuum pump pressure -650mmHg
Dimensions(mm) 230(D)x340(W)x260(H)
Programmable Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl
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