Spin-3000A

  • Spin-3000A

  • Compact unit for various coating solutions
    Programmable Recipe management
    Easy operation
    Adopt Drain, Exhaust hole in bowl
Photo-litho / Spin System / Coating - Spin-3000A
  • specification
Type Spin coater system
Substrate size piece ~ up to 8" circle
Rotation speed 300 ~ 8,000rpm(@without load) an error of less than 1%
AC Servo Motor(100W/400W)
Spin state 50steps, 20recipes (digital type)
Bowl size 12", Stainless steel
Acceleration / Deceleration rate Variable
Chuck material Anodized AL, Acetal
Electric power 220V, 5A
Oiless vacuum pump pressure -650mmHg
Dimensions(mm) 390(D)x570(W)x400(H)
Compact unit for various coating solutions
Programmable Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl
목록으로