MDA-12FA

  • MDA-12FA

  • Easy operation UI
    PC Operation with PLC control
    Image grab & Data log
    More than 100 Program recipes
    Microscope position control system
    Auto Align mark searching function
Photo-litho / Exposure System / Auto - MDA-12FA
  • specification
Type Full automatic (Mask Aligner)
Mask size up to 14" x 14"
Substrate size 12" circle
UV lamp & Power 5kW lamp & power supply
Uniform beam size 13.25" x 13.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity 25~60mW/cm2 (5kW)
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized)
Pre-aligner ±50um
Frame Anti-Vibration system
Options UV Intensity meter
etc.
Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Microscope position control system
Auto Align mark searching function
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