MDA-20000SA

  • MDA-20000SA

  • Easy operation UI
    PC Operation with PLC control
    Image grab & Data log
    More than 100 Program recipes
    Motorized joystick control
    Microscope position control system
Photo-litho / Exposure System / Manual - MDA-20000SA
  • specification
Type Joystick control Semi-Auto (Mask Aligner)
Mask size up to 610 x 610 (User spec.)
Substrate size 500 x 500 (User spec.)
UV lamp & Power 2kW & power supply
5kW & Power supply
Uniform beam size 600 x 600 (User spec.)
Beam Uniformity <±7%
Beam wavelength 350 ~ 450nm
Process mode Soft, Hard contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized)
Frame Anti-Vibration system
Options UV Intensity meter
etc.
Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Motorized joystick control
Microscope position control system
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