MDA-80SA

  • MDA-80SA

  • Easy operation UI
    PC Operation with PLC control
    Image grab & Data log
    More than 100 Program recipes
    Motorized joystick control
Photo-litho / Exposure System / Manual - MDA-80SA
  • specification
Type Joystick control Semi-Auto (Mask Aligner)
Mask size up to 9" x 9"
Substrate size piece to 8" x 8"
UV lamp & Power 2kW & power supply
Uniform beam size 10.25" x 10.25"
Beam Uniformity <±3~5%
Beam wavelength 350 ~ 450nm
365nm Intensity 15 ~ 25mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized)
Frame Anti-Vibration system
Options CCD BSA
UV Intensity meter
etc.
Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Motorized joystick control
목록으로