Manual

MDA-80MS

MDA-80MS

MDA-400LJ

MDA-400LJ

MDA-400M

MDA-400M

MDA-400M-6

MDA-400M-6

MDA-600S

MDA-600S

Type PC control semi auto Fully manual (Mask Aligner) Fully manual (Mask Aligner) PC / PLC control Manual (Mask Aligner) PC control semi auto
Mask size up to 9" x 9" up to 5" x 5" up to 5" x 5" up to 7" x 7" up to 7" x 7"
Substrate size piece to 8" piece to 4" dia piece to 4" dia piece to 6" piece to 6"
UV lamp & Power 1kW & power supply UV-LED & power supply 350W & power supply 350W & power supply 350W & power supply
Uniform beam size 8.25" x 8.25" 125mm dia 4.25" x 4.25" 6.25" x 6.25" 6.25" x 6.25"
Beam Uniformity <±4% <±3% <±3% <±3% <±4%
365nm Intensity ~25mW/cm2 ~20mW/cm2 ~30mW/cm2 ~25mW/cm2 ~25mW/cm2
Alignment accuracy 1um@1um PR thickness with vacuum contact 1um 1um 1um 1um
Process mode Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ x,y,z & θ x,y,z & θ x,y,z & θ x,y,z & θ
Options Anti-Vibration table
CCD BSA
UV Intensity meter
etc.
etc. Anti-Vibration table
UV Intensity meter
etc.
Anti-Vibration table
IR BSA
UV Intensity meter
etc.
Anti-Vibration table
CCD BSA
UV Intensity meter
UV-LED(365nm) exposure module
etc.
Beam wavelength 365nm Only 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm
Process resolution 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 0.8um@1um PR thickness with vacuum contact