• MDA-12SA

  • MDA-12SA(Mask Aligner) 는 세미 오토 모델로 조이스틱으로 스테이지를 제어 하는 방식으로 최대 12인치 시료의 공정이 가능하며, 연구소 및 기업체의 준 양산 / 양산 용으로 적합합니다.
Photo-litho / Mask Aligner / Manual - MDA-12SA
Type Joystick control Semi-Auto (Mask Aligner)
Mask size up to 13" x 13"
Substrate size piece to 12" x 12"
UV lamp & Power 2kW & power supply
5kW & Power supply
Uniform beam size 13.25" x 13.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity 15 ~ 20mW/cm2 (2kW)
25 ~ 60mW/cm2 (5kW)
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized)
Frame Anti-Vibration system
Options CCD BSA
UV Intensity meter
Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Motorized joystick control
Microscope position control system
Enable Ceramic substrate for Bump